Publication of the journal
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ELECTRONICS MATERIALS
Authors: Zamir V. Shomakhov, Svetlana S. Nalimova, Arina A. Rybina, Sergey S. Buzovkin, Cong D. Bui, Vyacheslav A. Moshnikov
507 - 515
TECHNOLOGICAL PROCESSES
Authors: Andrey A. Gavrikov, Vitaliy I. Smirnov
516 - 526
MICRO- AND NANOSYSTEM TECHNOLOGY
Authors: Phyo Win Tun, Boris M. Simonov, Sergey P. Timoshenkov
527 - 535