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During formation of silver nanoparticles arrays by condensation to the cold substrate the initial condensate is non-stable. For the formation of non-stable arrays with the form, close to a spherical one, subsequent weak thermal treatment is required. The nanosize state for many substances significantly differs from the mass state. In the work the behavior of the silver nanoparticle array during low-temperature annealing has been shown. Using the atomic-force microscopy the evolution of the silver nanoparticles array, formed on the SiO by the vacuum-thermal evaporation the unheated substrate during in-situ heating up to 200 °C, has been investigated. The qualitative estimate of the temperature influence on the geometry of the nanoparticles arrays has been obtained. It has been experimentally shown that a sharp enlargement of silver nanoparticles and decreasing of their quantity on the surface occurs in a small temperature of (75-100 °C). After statistical processing of the obtained data the average sizes of the formed particles and their density per unit area at each stage of the experiment have been determined and the corresponding dependences have been obtained.

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The formation of nanostructures by the method of the chemical precipitation from the gas phase using PECVD and glow-discharge plasma has been considered. The investigations were carried out in the 3000 - 700 °C temperature range. The influence of the Ni catalyst thickness and of the concentration of the carbon-containing components in vapor phase on the carbonic deposit structure has been studied. The productive growth of the homogeneous vertical nanotubes and grapheme flakes at 350 °C has been obtained. The electrophysical features of the obtained structures have been studied.

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The possibility of the synthesis of carbon nanotubes by the method of chemical deposition of acetylene at 400-800 °C temperature on the surface of a metal film of amorphous alloy Ni-Ta-N with low nickel content (~ 25 at.%) has been demonstrated. It has been shown that an addition of nitrogen into the Ni-Ta alloy promotes the formation of tantalum nitride and extrusion on the surface of the nickel clusters, acting as a catalyst in the growth of carbon nanotubes. The Raman spectroscopy has revealed that while increasing the temperature of the synthesis process the quality of the carbon nanotubes is improved.

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