Persons
Sergey V. Dubkov
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Skorik Sergey Nikolaevich
Cand. Sci. (Eng.), Engineer, SPC «Technological Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Head of SMC «Technological Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)