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Elena M. Eganova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)

Lidia S. Volkova

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences, Russia, 115487, Moscow, Leninsky ave., 32A
Engineer of the Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Junior Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnology and Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Leninsky ave., 32A)

Dudin Aleksandr Aleksandrovich

Bulyarskiy Sergey Viktorovich

Гринаковский Егор Денисович

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