Persons
Dr. Sci. (Phys.-Math.), Director of SMC «Technological Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky Prospect, 32A)
Орлов Андрей Петрович
Поляков Максим Викторович