Researcher of the Scientific and Educational Center «Probe Microscopy and Nanotechnology», National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)