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The technology of forming the carbon emitters for the integrated field emission elements has been developed. The studies have revealed the modes of preparing various film structures of carbon: diamond, graphite, graphene-like. The low-temperature method for producing the ultrafine diamonds has been developed. The high-emission properties of the nanodiamond-graphite emitters have been provided due to the effect of self-organization of diamond nanocrystals in graphite films during deposition at low pressure vapor of ethanol using a highly-nonequilibrium microwave plasma.
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Micromechanical accelerometers have wide range of applications in industry and robotechnics due to the main advantages such like low power consumption, small dimensions and weight, low cost in serial production. Therefore, micromechanical accelerometers research and development received priority. In this work, finite element analysis software was used for modeling the sensitive element, for this method allows providing static and modal analysis. The results of preliminary calculations of the scale factor of the accelerometer that can be assembled based on the developed sensor and sigma-delta transducer, are provided. The article describes the technological process of manufacturing sensitive elements of micromechanical accelerometers. In this case, anisotropic liquid chemical etching of silicon was used, which makes it possible to obtain different profiles of the corresponding crystallographic planes. The results of a study of the influence of technological errors on the geometric dimensions of sensitive elements are provided: the dependence of the value of the lateral undercut of silicon on the accuracy of the angular alignment of the mask with the crystallographic axis of the plate (100) was revealed. The design of the sensitive element of the micromechanical accelerometer has been developed. The performed simulations have proved out the performance of the structure, the calculations have shown the change in the scale factor in the temperature range from -60 to +125 °C, the value of the nominal capacity and capacity with a change in linear acceleration in the range of ± 60 g . In the manufacture of a sensitive element on the basis of the studies carried out, it is possible to obtain a lateral undercut of no more than 5 microns at a depth of anisotropic liquid chemical etching of 250 microns for KDB-0,01 plates with an orientation tolerance of ± 30 arc minutes or with a misorientation of the same magnitude allowed during exposure.
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The possibilities of adjusting the parameters of the MEMS angular rate ring sensors using the balancing, effected by changing the mass of individual segments of the ring and the optimization of in-situ pressure in the manufacturing process of these devices, have been investigated. The positive results for the test samples have been obtained. An algorithm for performing the balancing by changing the mass of the ring segments, permitting to reduce the difference between the resonance frequency of the ring in different directions, has been proposed.
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The micromechanical accelerometers (MMA) find more common application in the information-measuring and opto-electronic systems. The parameters and characteristics of MMA are determined by their design and manufacturing technology, the MMA functioning is affected by a significant number of external and internal influencing factors. In the work, a more precise definition and generalization of formulas for estimate the moment of elasticity and stiffness of the sensitive element torsions have been made. In designing SE a trivial criterion of efficiency has been obtained. The way of creating an eridit system of the models for the estimation of the MMA working capacity in view of the thermomechanical influences of the environment has been planned.
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