The merit factor of oscillating circuit of the MEMS sensor’s sensitive element depends on numerous factors, in particular on sensitive element geometry and vacuum degree. Micromechanical elements under development can perform tasks of measuring acceleration, angular rate, pressure, etc. Sensitive element is placed in a separate cell box with specified gas filling, the state of which influences the instrument capabilities. In this work, a method for determination of MEMS sensor sensitive element’s oscillating circuit merit factor dependence on vacuum degree is proposed. A test setup for research is described. Based on the experimental data obtained, numeric calculations of merit factor were performed. It has been established that vacuum degree exerts a significant impact on the merit factor of oscillating circuit.
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Key words:
MEMS sensor, sensitive element, oscillating circuit, vacuum degree, merit factor
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Published in:
MICRO- AND NANOSYSTEM TECHNOLOGY
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Bibliography link:
Timoshenkov S. P., Timoshenkov A. S., Anchutin S. A., Kochurina E. S., Dernov I. S., Musatkin A. S., Lebedev A. A. Investigating the influence of vacuum degree on merit factor of oscillating circuit of MEMS sensor sensitive element. Proc. Univ. Electronics, 2023, vol. 28, no. 5, pp. 642–648. https://doi.org/10.24151/1561-5405-2023-28-5-642-648. – EDN: REPBAZ.
Sergey P. Timoshenkov
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Stepan A. Anchutin
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Micro Devices” LLC., Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Elena S. Kochurina
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Micro Devices” LLC., Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Ilya S. Dernov
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Micro Devices” LLC., Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Alexandr S. Musatkin
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; “Laboratory of Micro Devices” LLC., Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Andrey A. Lebedev
Moscow Aviation Institute, Russia, 125993, Moscow, Volokolamskoe highway, 4
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