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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Cand. Sci. (Eng.), Assoc. Prof. of the Institute of General Engineering Training, Moscow Aviation Institute (Russia, 125993, Moscow, Volokolamskoe highway, 4)
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MEMS sensor
sensitive element
oscillating circuit
vacuum degree
merit factor
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Investigating the influence of vacuum degree on merit factor of oscillating circuit of MEMS sensor sensitive element
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