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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika

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Microsystems technology has made it possible to manufacture micromechanical impact sensors characterized with small size and mass, low power consumption, environmental durability and vibration survival capability. Technological process of such sensors manufacturing requires a significant amount of time, resources and equipment. Hence the selection of new alternative materials for the manufacture of sensors is a relevant issue. In this work, the design of sensitive element of impact sensors made of FR4 High Tg170 fiberglass is presented. The developed of sensitive element consists of a rotor, a stator and a plate that creates a gap between them. The of sensitive element impact behavior was simulated using a finite element analysis. At the nominal level of the of sensitive element actuation of 100 g, its external dimensions were 30 × 30 mm with a thickness of 1.5 mm. Designed devices were manufactured and tested on the turntable of the centrifuge. The results of tests on the of sensitive element response level have demonstrated that most of the sensors have good repeatability. Nevertheless, the actual of sensitive element response levels differ from one another by tens of units g, which can be attributed to the dependence of the response level on the amount of solder used to mount the sensors, on the selected temperature profile of soldering, and the techniques employed to secure the of sensitive element of impact sensor to the base plate.
Elena S. Kochurina
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6; National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Stepan A. Anchutin
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6; National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Ilya S. Dernov
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6; National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Yakov I. Putilov
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
Mikhail I. Usov
“Laboratory of Micro Devices” LLC, Russia, 124527, Moscow, Zelenograd, Solnechnaya alley, 6
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