Persons

The energy intensity of the air conditioning system of clean rooms of microelectronics is an important indicator of the competitiveness in the branch. The proposed approach makes it possible to adequately assess the thermodynamic perfection of the system on the basis of various schemes for the formation of aerodynamic regime by compiling the exergic balance flows of the substance and determining the exergy losses in it. This serves as an objective prerequisite for optimizing the hardware-technology solution by the energy intensity criterion, because the thermodynamic indices of the system quality are the necessary but not sufficient condition for making a final scheme decision. It has been proposed to use as an index for evaluating the economical level of the air conditioning system the exergy cost content. The thermo-economic criterion for selecting a technological scheme is the minimum objective function to minimize the cost of a unit of specific air exergy. Based on the exergic analysis and by the constructing diagrams of the exergy and cost parameters of the system, the conditions for the most effective provision of a technological microclimate of clean rooms are determined on external conditions. The calculation has shown that the thermodynamic and economic optimums in the analyzed systems mainly coincide. Thus, the thermodynamic approach reveals the non-effective elements of SLE by the level of specific exergy, and the thermodynamic analysis makes it possible to determine the feasibility of using additional hardware and technology components of the system under study.

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The air removal system significantly determines the ecological efficiency of the entire life-support providing clean rooms. In the work as a scientific basis for decision-making on the structure and configuration of the air removal system, the exergetic approach of thermographic analysis and as the criterion of environmental impact the value of the specific exergy of the emission have been proposed. A structural-functional scheme of the system has been proposed, on the basis of which the exergy balances have been complied, the losses of specific exergy and the efficiencies in its main elements under various emission control schemes have been determined. It has been determined that the direct air removal with a thermodynamic advantage over the air removal system with additional purification is less favorable for the environment due to a significant level of exergy of emissions as a factor, determining the possibility of physical and chemical processes in the environment leading to the environment damage. The legitimacy of using the exergy as an objective and universal single indicator, linking the thermodynamic and the environmental quality of the system has been shown. The practical significance of this approach is to establish the important relationships between various aspects of the design and operation of the life-support systems for clean microelectronics and to develop measures to reduce the environmental pollution by reducing exergy of emissions.

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In the modern system of process safety management, the procedure for occupational risk assessment and management as a probability of causing damage to health in the performance of work duties has become mandatory for microelectronics enterprises. This procedure involves the use of systematic methods for risk identification, monitoring and analysis, obtained results recording and interpretation, and the necessary reporting preparation. This paper analyzes the risks in the main structural divisions of the microelectronics enterprise and suggests corrective organizational measures to minimize the likelihood of a dangerous event and subsequent damage. The procedure was carried out using the Fine - Kinney method, the most informative approach to risk assessment, taking into account the severity of the incident and its economic consequences for the enterprise. It has been established that the sources of significant risk are typically related to space planning flaws, failure to meet the time limit for X-ray equipment work licensing, absence of draw ventilation, and outmoded system of used lapping slurry collection. These shortcomings elimination opens up the opportunities for occupational hazard class lowering and downward revision in tariffs.

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The most part of chemical substances applied in clean rooms are aggressive and toxic, which requires analysis of air removal system not only from functionally related standpoint but also with regard to energy and environment. This study investigates the possibility of applying the methodology of energy and environmental analysis to compare the environmental friendliness of various air removal systems of clean rooms. It was shown that direct air removal, although having a thermodynamic advantage over a system with purification, was less favorable for the environment due to the significant level of the environmental index, which reflected the considerable potential economic damage from emissions to the atmosphere. This investigation has revealed the pollutants dominating in the composition of emissions and determining the validity of the decision on the structure of the air removal system of the clean room, taking into account the environmental, economic and biomedical aspects of its operation.

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The methods of non-destructive testing of the heat flows through the building envelope of the buildings and structures have been presented. The results of computer and analytical assessment of the measurements errors have been given. The results of the investigations demonstrate the efficiency of the methods and the possibility of its wide-spread application for thermal inspection of various objects.

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