National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences, Russia, 115487, Moscow, Leninsky ave., 32A
Engineer of the Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Junior Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnology and Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Leninsky ave., 32A)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Eng.), Director of the Institute of Advanced Materials and Technologies, Head of the Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)