An amplification of magnetic induction in permalloy allows a several times increase of the sensitivity of magneto-semiconductor mycrosystems magnetic field. While using the permalloy films as the magnetic concentrators, it is important to exclude the anomalous codeposition of alloy components and to reduce the variability of technological parameters for optimum magnetic properties. In the work the chloride electrolyte with the pH correction by hydrochloride acid, which provides the congruent electrochemical permalloy deposition while heating has been proposed. The magnetic properties of the permalloy films, corresponding to bulk samples, have been determined. It has been shown that the magnetic properties of the permalloy films are sensitive to deviation of the composition from the ratio of 4.26 components. The control of accuracy of preparing an electrolyte for electrochemical deposition has been performed using the spectrophotometric investigation of chloride electrolyte. It has been established that the anomaly of the permalloy electrodeposition is associated with the main feature of iron ions-the existence of variable Valence iron with two or three values in the charge of ions during the hydrolysis of ions salts.
The use of chloride electrolytes for electrochemical deposition of NiFe permalloy seems to be promising because the sulphate electrolytes in presence of sulphur are non-stable. The magnetic properties of NiFe are very sensitive to rejection of the whole component o 4.26. In this work the control of preparing the electrolyte for electrochemical deposition has been conducted using the spectrophotometric investigation of the chloride electrolyte. The analysis of the electrolyte absorption spectrum and scattering of light by particles of iron hydroxide colloid has revealed that the dissociation of the two-valent iron and the mechanism of anomalous electrodeposition depend on temperature and affect the electrochemical deposition of the permalloy films. It has been noted, that the specific feature of the FeCl solution during hydrolysis of FeCl is the iron hydroxide precipitate (Fe(OH) in the form of colloid particles with the complex forming boric acid. It has been shown that from the chloride electrolyte with iron chloride solution filtration nickel is precipitated better than iron. It has been stated that normal congruent deposition of the NiFe alloy films takes place and the abnormal codeposition is excluded.
The results of the development of technologies for magnetic semiconductor chips based on thin-film magnetoresistive multilayer nanostructures are presented. A brief overview of the main achievements in the field of magnetometric devices based on anisotropic and giant magnetoresistive effect is made.