Persons

Trifonov Aleksey Yurevich

Еганова Елена Михайловна

Lidiya S. Volkova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Moscow, Russia
Junior Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky Ave, 32А)

Dudin Aleksandr Aleksandrovich

Bulyarskiy Sergey Viktorovich

124498, Moscow, Zelenograd, Bld. 1, Shokin Square, MIET, editorial office of the Journal "Proceedings of Universities. Electronics", room 7231

+7 (499) 734-62-05
magazine@miee.ru