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Гринаковский Егор Денисович

Dubkov Sergey Vladimirovich

National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia,124498, Moscow, Zelenograd, Shokin sq., 1)

Skorik Sergey Nikolaevich

Savitskiy Andrey Ivanovich

Cand. Sci. (Eng.), Engineer, SPC «Technological Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Kitsyuk Evgeniy Pavlovich

Cand. Sci. (Phys.-Math.), Head of SMC «Technological Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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