Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)