Persons

Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky Prospect, 32A)

Орлов Андрей Петрович

Поляков Максим Викторович

Trifonov Aleksey Yurevich

Elena M. Eganova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)

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