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The air removal system significantly determines the ecological efficiency of the entire life-support providing clean rooms. In the work as a scientific basis for decision-making on the structure and configuration of the air removal system, the exergetic approach of thermographic analysis and as the criterion of environmental impact the value of the specific exergy of the emission have been proposed. A structural-functional scheme of the system has been proposed, on the basis of which the exergy balances have been complied, the losses of specific exergy and the efficiencies in its main elements under various emission control schemes have been determined. It has been determined that the direct air removal with a thermodynamic advantage over the air removal system with additional purification is less favorable for the environment due to a significant level of exergy of emissions as a factor, determining the possibility of physical and chemical processes in the environment leading to the environment damage. The legitimacy of using the exergy as an objective and universal single indicator, linking the thermodynamic and the environmental quality of the system has been shown. The practical significance of this approach is to establish the important relationships between various aspects of the design and operation of the life-support systems for clean microelectronics and to develop measures to reduce the environmental pollution by reducing exergy of emissions.

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The most part of chemical substances applied in clean rooms are aggressive and toxic, which requires analysis of air removal system not only from functionally related standpoint but also with regard to energy and environment. This study investigates the possibility of applying the methodology of energy and environmental analysis to compare the environmental friendliness of various air removal systems of clean rooms. It was shown that direct air removal, although having a thermodynamic advantage over a system with purification, was less favorable for the environment due to the significant level of the environmental index, which reflected the considerable potential economic damage from emissions to the atmosphere. This investigation has revealed the pollutants dominating in the composition of emissions and determining the validity of the decision on the structure of the air removal system of the clean room, taking into account the environmental, economic and biomedical aspects of its operation.

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