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Sergey V. Dubkov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Eng.), Director of the Institute of Advanced Materials and Technologies, Head of the Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Skorik Sergey Nikolaevich

Andrey I. Savitskiy

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
Cand. Sci. (Eng.), Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Junior Scientific Researcher of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Evgeny P. Kitsyuk

SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Head of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Eritsyan Georgiy Spartakovich

Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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