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Elena M. Eganova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)

Lidiya S. Volkova

Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences, Russia, 119991, Moscow, Leninsky ave., 32A
Junior Scientific Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky ave., 32A)

Dudin Aleksandr Aleksandrovich

Bulyarskiy Sergey Viktorovich

Гринаковский Егор Денисович

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