Persons

The changes in the structure and phase composition of silicon monoxide in the disproportional reaction at high temperature with the formation of the Si nanocrystalline phase have been investigated. The nanocrystalline powder after separation from silicon oxide by powder diffraction and small-angle X-ray scattering has been studied. It has been found that under optimal conditions of the silicon monoxide heat treatment the obtained powder contains the nanosilicon particles of 17-20 nm size in the volume fraction of 40%.

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The technological process for the production of silicon nanopparticles from silicon monoxide, which permits to control the particle size in the 2-10 nm range, and the methods of nanosilicon coating for solar cells have been developed. It has been shown that the nanosilicon films are characterized by good anti-reflection and passivating properties and can be successfully used in the solar cell production technology.

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The results of the comprehensive study on the parameters of the diffuse-barrier structures TiN/Ti by methods of relative X-ray reflectometry and diffuse X-ray scattering, based on a two-wave X-ray optical measurement scheme, have been presented. The specified X-ray optical scheme provides a study on two different areas of diffuse scattering during one measurement, which increases the accuracy and uniqueness of the analysis. It has been shown that the presented complex of methods permits to resolve the ambiguities, such as the “density - roughness” of the inverse problem of reflectometry and to calculate the parameters of the buried layers in the studied structures.

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