The results of the comprehensive study on the parameters of the diffuse-barrier structures TiN/Ti by methods of relative X-ray reflectometry and diffuse X-ray scattering, based on a two-wave X-ray optical measurement scheme, have been presented. The specified X-ray optical scheme provides a study on two different areas of diffuse scattering during one measurement, which increases the accuracy and uniqueness of the analysis. It has been shown that the presented complex of methods permits to resolve the ambiguities, such as the “density - roughness” of the inverse problem of reflectometry and to calculate the parameters of the buried layers in the studied structures.
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