Persons
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
Menu button
Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
home
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
Search
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Persons
Elektronika
Persons
Cand. Sci. (Eng.), Assoc. Prof., Vice-Rector for Academic Affairs, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Article author
Turn
Line Edge Roughness
LER effect
photoresist mask edge roughness
integrated circuits
ICs
photonic integrated circuits
PICs
IC elements
device and process simulation
CAD
domestic microelectronic technologies
Ask filters
Causes of LER effect occurrence and methods for its minimization in IC manufacturing
Counter: 1260 | Comments : 0
Development of domestic CAD system for instrument-technological modeling for microelectronic technologies
Counter: 1316 | Comments : 0