National Research University of Electronic Technology, Moscow, Russia; SMC “Technological Centre”, Moscow, Russia
Cand. Sci. (Eng.), Senior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Junior Scientific Researcher of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
National Research University of Electronic Technology, Moscow, Russia
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Moscow, Russia
Dr. Sci. (Eng.), Prof., Director, Institute of System and Software Engineering and Information Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)