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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Cand. Sci. (Chem.), Scientific Researcher of the Scientific Research Laboratory of Integrated Biochemical Nanosensors, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
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tantalum oxide
atomic layer deposition
ISFET
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Atomic layer deposition of tantalum oxide for field effect sensors
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