Persons
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
Menu button
Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
home
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
Search
Home
About
Ethics
Peer review process
Authors
News
Issues
Contacts
Subscribe
Search
Persons
Elektronika
Persons
Junior Scientific Researcher of the Micro- and Nanoelectronics and Biosensory Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16a, bld. 11)
Article author
Turn
tantalum oxide
atomic layer deposition
ISFET
Ask filters
Atomic layer deposition of tantalum oxide for field effect sensors
Counter: 290 | Comments : 0