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Elena M. Eganova

Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)

Lidiya S. Volkova

Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences, Russia, 119991, Moscow, Leninsky ave., 32A
Junior Scientific Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky ave., 32A)

Aleksander A. Dudin

; Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Russia, 199334, Moscow, Leninsky ave., 32A
Cand. Sci. (Phys.-Math.), Head of the Structural Analysis and Metrology Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 199334, Moscow, Leninsky ave., 32A)

Sergey V. Bulyarskiy

SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1; Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences, Russia, 199334, Moscow, Leninsky ave., 32A
Dr. Sci. (Phys.-Math.), Chief Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 199334, Moscow, Leninsky ave., 32A), Senior Scientific Researcher of the Research Laboratory of Advanced Processes, SMC “Technological Centre”

Egor D. Grinakovskiy

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1SMC “Technological Centre”, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7
PhD student, Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Process Engineer of Pilot Production, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
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