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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Cand. Sci. (Eng.), Senior Researcher of the Micro- and Nanoelectronics and Biosensorics Department, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16A, bld. 11)
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tantalum oxide
atomic layer deposition
ISFET
tungsten oxide
rotating disk electrode
nanomaterials
photocatalytic coatings
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Atomic layer deposition of tantalum oxide for field effect sensors
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Research on effect of hydrodynamic conditions during anodic tungsten oxide formation on its morphology and photocatalytic properties
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