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Unique properties of carbon nanotubes (CNTs) make them promising for creating composite electrode materials, based on the combination of CNTs with transition metals oxides. The influence of the RF plasma functionalization on vertically aligned carbon nanotubes arrays structural characteristics has been studied using the combinational scattering spectroscopy. At a higher partial argon consumption and low total gases expenditure the processing time pull with nickel oxide distribution, deposited by the SILAR method, upon the nanotubes has been determined. By means of the scanning electron microscopy it has been shown that an increase of the functionalization time from 30 to 1200 seconds permits to increase the depth of CNT surface coverage by the nickel oxide layer from 300 nm to 2.5 μm. The resultant composite structures can be used as a supercapacitor electrode.

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