Senior Engineer of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
In this work, a lot of attention has been paid to the study of the processes of degradation, failure mechanisms, analysis of the processes of chemical kinetics and its effective models for determining the reliability of products microsystem technology (MST) from the viewpoint of statistical thermodynamics. The first attempt to use a modified Gibbs equation in the form Semenchenko for the objectives of the study of mechanisms failures MST products has been made.
The micromechanical accelerometers (MMA) find more common application in the information-measuring and opto-electronic systems. The parameters and characteristics of MMA are determined by their design and manufacturing technology, the MMA functioning is affected by a significant number of external and internal influencing factors. In the work, a more precise definition and generalization of formulas for estimate the moment of elasticity and stiffness of the sensitive element torsions have been made. In designing SE a trivial criterion of efficiency has been obtained. The way of creating an eridit system of the models for the estimation of the MMA working capacity in view of the thermomechanical influences of the environment has been planned.
Two approaches used for justifying the reliability models - the physical-probabilistic and physical-statistical ones - have been considered. The equivalence of both approaches has been shown. Using the methods of individual forecasting, the assessment of the probability of the non-failure operation of the linear acceleration converter (PLD) sample using both methods has been made and it has given the same results.