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In this work, a lot of attention has been paid to the study of the processes of degradation, failure mechanisms, analysis of the processes of chemical kinetics and its effective models for determining the reliability of products microsystem technology (MST) from the viewpoint of statistical thermodynamics. The first attempt to use a modified Gibbs equation in the form Semenchenko for the objectives of the study of mechanisms failures MST products has been made.
Sergey P. Timoshenkov
National Research University of Electronic Technology, Moscow, Russia

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