National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Assoc. Prof., Prof. of the Institute of Physics and Applied Mathematics, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Senior Researcher, Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences (Russia, 115487, Moscow, Nagatinskaya st., 16a, bld. 11)