Persons
Researcher, SMC «Technology Center» (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Phys.-Math.), Head of the High-Technology Center, FSUE F.V. Lukin Physical Problems Research Institute (124460, Moscow, Zelenograd, Georgiyevskiy ave., 5
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)