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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Junior Researcher of the Laboratory of Microsystem Technology of the Advanced Engineering Schools, Tomsk State University of Control Systems and Radioelectronics (Russia, 634050, Tomsk, Lenin Ave., 40)
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resonator
membrane
composite
natural frequency
mechanical and thermal stresses
thermal deformations
resonant frequency method
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Analysis of temperature stresses in a composite sensitive element of a resonant-frequency pressure sensor
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