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Evaluating temperature errors and developing methods for reducing them has been among the most important problems in the microsensors design. The temperature effect on the performance of a resonant-frequency microelectromechanical pressure sensor was studied in this work. This study aim was to numerically evaluate the mechanical stresses occurring in a resonant-frequency pressure sensor and to investigate their impact on the sensor frequency characteristics. The stress-strain state numerical modeling of a membrane under static pressure and subject to a temperature field (from –50 to +85 °C) was performed by the finite element method. The authors also studied the natural frequencies of resonators with various configurations, located above the membrane and consisted of a layered composite structure based on titanium and aluminum oxide. Through the obtained results, the design solutions were proposed. They were to compensate for thermal deformations of the resonators. The temperature field influence on their frequency characteristics was reduced and, therefore, the overall error of the developed sensor was also decreased. The proposed design solutions allow reducing thermal stress in composite resonators to 9 % of the original value at ceramic membrane use. Modifying the resonator cross-section let reduce thermal stress by 58 %. The sensitive element total error, expressed as the temperature frequency coefficient, has been reduced from 2620–2770 to 500 ppm/°C.

Key words: resonator, membrane, composite, natural frequency, mechanical and thermal stresses, thermal deformations, resonant frequency method
Published in: MICRO- AND NANOSYSTEM TECHNOLOGY
Bibliography link: Vtorushin S. E., Talovskaya A. A., Barbin E. S., Kulinich I. V., Koleda A. N., Nesterenko T. G. Analysis of temperature stresses in a composite sensitive element of a resonant-frequency pressure sensor. Izv. vuzov. Elektronika = Proc. Univ. Electronics. 2026;31(4):448–460. (In Russ.). DOI: 10.24151/1561-5405-2026-31-4-448-460.WQOTIR
Financial source: the work has been supported by the Ministry of Education and Science of the Russian Federation (Agreement FEWM-2024-0008) and TUSUR as part of the Priority 2030 program.

Sergey E. Vtorushin
Tomsk State University of Control Systems and Radioelectronics, Russia, 634050, Tomsk, Lenin Ave., 40

Alena A. Talovskaya
Tomsk State University of Control Systems and Radioelectronics, Russia, 634050, Tomsk, Lenin Ave., 40

Evgenii S. Barbin
Tomsk State University of Control Systems and Radioelectronics, Russia, 634050, Tomsk, Lenin Ave., 40; V. E. Zuev Institute of Atmospheric Optics, Russia, 634055, Tomsk, Academician Zuev sq., 1

Ivan V. Kulinich
Tomsk State University of Control Systems and Radioelectronics, Russia, 634050, Tomsk, Lenin Ave., 40

Alexey N. Koleda
Tomsk Polytechnic University, Russia, 634050, Tomsk, Lenin Ave., 30

Tamara G. Nesterenko
Tomsk State University of Control Systems and Radioelectronics, Russia, 634050, Tomsk, Lenin Ave., 40

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UDK: 531.787.9
Publication type: Scientific article
Source lang: Russian
DOI: 10.24151/1561-5405-2026-31-4-448-460
RISC id: WQOTIR

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