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Study of the electrostatic chuck parameters dependencies

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Composition control of Mo-Si-N-O thin films during reactive magnetron sputtering

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Calculation of the ponderomotive force of the electrostatic chuck of monopolar type in a plasma chemical etcher

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28.08.2026 Vol. 31, no. 4, 2026 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 31, no. 4, 2026, has been published on August 25, 2026.

12.08.2026 Vol. 31, no. 3, 2026 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 31, no. 3, 2026, has been published on June 29, 2026.

27.04.2026 Vol. 31, no. 2, 2026 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 31, no. 2, 2026, has been published on April 15, 2026.

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