Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences, Russia, 119991, Moscow, Leninsky ave., 32A
Junior Scientific Researcher of the Structural Analysis and Metrology Department, Institute of Nanotechnologies of Microelectronics of the Russian Academy of Sciences (Russia, 119991, Moscow, Leninsky ave., 32A)
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Cand. Sci. (Eng.), Director of the Institute of Advanced Materials and Technologies, Head of the Research Laboratory “Photonic Sensors and Plasmonic Materials”, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)