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Skorik Sergey Nikolaevich

Andrey I. Savitskiy

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
Cand. Sci. (Eng.), Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Junior Scientific Researcher of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)

Evgeny P. Kitsyuk

SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Head of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Eritsyan Georgiy Spartakovich

Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Dmitry G. Gromov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); I. M. Sechenov First Moscow State Medical University (Russia, 119435, Moscow, Bolshaya Pirogovskaya st., 2, bld. 4)
Dr. Sci. (Eng.), Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Senior Scientific Researcher, I. M. Sechenov First Moscow State Medical University (Russia, 119435, Moscow, Bolshaya Pirogovskaya st., 2, bld. 4)
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