Persons
Dr. Sci. (Eng.), Prof., Chief Researcher, Scientific Research Institute – Federal Research Centre for Projects Evaluation and Consulting Services (Russia, 127055, Moscow, Obraztsov st., 12, bld. 2)
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The program complex, which permits to decrease a methodical error of the diffractometrical method of measuring geometrical sizes of the topology units, introduced at the modeling analysis stage, has been described. The program complex includes the settlement module, the databank of parameters of virtual test structures, the auxiliary search system and the complex of procedures for visualization of the obtained results.
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