Dr. Sci. (Eng.), Prof. of the Solid State Physics Department, Saratov State University (Russia, 410012, Saratov, Astrakhanskaya st., 83), Chief Researcher of the Laboratory of Submicron Electron-Ion Technology Saratov Branch of the V. A. Kotelnikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Russia, 410019, Saratov, Zelenaya st., 38)