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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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PhD student of the Institute of Integrated Electronics, National Research University of Electronic Technology (Russia, 124498, Russia, Moscow, Zelenograd, Shokin sq., 1)
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process control
scanning electron microscopy
SEM
transmission electron microscopy
TEM
atomic force microscopy
AFM
scatterometry
critical dimensions
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Features of three-dimensional profile control of elements and structures of nanoscaled ICs. Review
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