Persons

The applicability of one of the system analysis method for clean rooms of the microelectronics technology to improve their energy and ecological indicators has been investigated. The possibility of using in practice the ecological assessment method of the air-conditioning system for clean rooms in microelectronics using the functional-ecological analysis has been considered, and its algorithm and implementation example have been given. The functional-ecological analysis is a time-consuming method, however, the efficiency and completeness make it a considerably advantageous in investigation of clean rooms.

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