Persons
Dr. Sci. (Eng.), Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Master's degree student of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Prof., Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Dr. Sci. (Eng.), Prof. of the Institute of Nano and Microsystem Technology, National Research University of Electronic Technology (124498, Russia, Moscow, Zelenograd, Shokin sq., 1)
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)