Cand. Sci. (Eng.), Assoc. Prof. of the Electronic Engineering Department of the Moscow Institute of Electronics and Mathematics, National Research University Higher School of Economics (Russia, 123458, Moscow, Tallinskaya str. 34), Research Scientist, Institute for Design Problems of Microelectronics of Russian Academy of Sciences (Russia, 124365, Moscow, Zelenograd, Sovetskaya st. 3)