National Research University of Electronic Technology, Moscow, Russia; SMC “Technological Centre”, Moscow, Russia
PhD student of the Institute of Integrated Electronics named after Academician K. A. Valiev, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Process Engineer of the Plasma Chemical Processes Section of the Pilot Production, RPC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
National Research University of Electronic Technology, Moscow, Russia; SMC “Technological Centre”, Moscow, Russia
Student of the National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1), Technician of the Plasma Chemical Processes Section of the Pilot Production, SMC “Technological Center” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1, bld. 7)
National Research University of Electronic Technology, Moscow, Russia
Engineer of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
National Research University of Electronic Technology, Moscow, Russia
Laboratory Assistant of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)