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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Cand. Sci. (Eng.), Software Engineer, JSC “Scientific Research Institute of Semiconductor Devices” (Russia, 634034, Tomsk, Krasnoarmeyskaya st., 99A)
Article author
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automation
surface inspection
integrated circuits
MMIC
photomask
microphotography
defect map
neural network
defect detection
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Algorithm for automatic inspection of the surface of integrated circuits based on calculation of pixel distance
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