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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Junior Scientific Researcher of the Laboratory of Integrated Optics and Microwave Photonics, Tomsk State University of Control Systems and Radio Electronics (Russia, 634050, Tomsk, Lenin ave., 40)
Article author
Turn
automation
surface inspection
integrated circuits
MMIC
photomask
microphotography
defect map
neural network
defect detection
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Algorithm for automatic inspection of the surface of integrated circuits based on calculation of pixel distance
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