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Cand. Sci. (Phys.-Math.), Senior Researcher, Prokhorov General Physics Institute of the Russian Academy of Sciences (Russia, 119991, Moscow, Vavilova st., 38)

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Investigation of the formation process and stability of Mo-Si and Ta-Si based phase-shifting layers for photomasks under DUV with 248 nm wavelength exposure

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27.04.2026 Vol. 31, no. 2, 2026 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 31, no. 2, 2026, has been published on April 15, 2026.

11.03.2026 Vol. 31, no. 1, 2026 has been published

Dear colleagues!
We are pleased to inform you that latest issue of scientific and technical journal "Proceedings of Universities. Electronics", vol. 31, no. 1, 2026, has been published on February 16, 2026.

25.02.2026 Please be advised

Starting from 2027, according to Notice received by our Editorial Office, the Pleiades Publishing group of companies discontinues the collaboration with our journal.
Articles published in the Journal “Proceedings of Universities. Electronics” will not be included in additional issues of the journals Semiconductors (iss. 13) and Russian Microelectronics (iss. 7) anymore.

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