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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika: Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii.
Elektronika
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Izvestiya Vysshikh Uchebnykh Zavedenii. Elektronika
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Elektronika
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Cand. Sci. (Eng.), Assoc. Prof. of the Telecommunication Systems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Article author
Turn
allotropic carbon compounds
silicon-carbon films
silicon-metal-carbon films
graphene films
polyorganic precursor
polyphenylmethylsiloxane
self-modulation of the phase composition of metal-silicon-carbon films
Raman spectra
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Characteristics of amorphous silicon-carbon and metal-silicon-carbon films, areas of possible applications. Review
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