The technology of forming the carbon emitters for the integrated field emission elements has been developed. The studies have revealed the modes of preparing various film structures of carbon: diamond, graphite, graphene-like. The low-temperature method for producing the ultrafine diamonds has been developed. The high-emission properties of the nanodiamond-graphite emitters have been provided due to the effect of self-organization of diamond nanocrystals in graphite films during deposition at low pressure vapor of ethanol using a highly-nonequilibrium microwave plasma.
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