Persons
Evgeniy M. Portnov
National Research University of Electronic Technology, Moscow, Russia
PhD student of the Institute of System and Software Engineering and Computer Science, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Magerramov Rafael Vagifovich
Sergey P. Timoshenkov
National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Assoc. Prof. of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)